Method for forming semiconductor device with helmet structure between two semiconductor fins

ABSTRACT

A method for forming a semiconductor device includes: forming a semiconductor fin extending upwardly from a substrate; breaking the semiconductor fin into two separate fin structures; conformally forming a first dielectric layer over the fin structures; after conformally forming the first dielectric layer, filling a recess between the fin structures with a first flowable oxide; etching back the first flowable oxide to lower a top surface of the first flowable oxide to a level below top surfaces of the fin structures; conformally forming a second dielectric layer over the first dielectric layer and the etched back first flowable oxide, such that a laterally portion of the second dielectric layer in the recess is lower than the top surfaces of the fin structures; planarizing the first and second dielectric layers to expose the fin structures, while leaving the laterally portion of the second dielectric layer covering the first flowable oxide.

PRIORITY CLAIM AND CROSS-REFERENCE

The present application is a Divisional Application of the U.S.application Ser. No. 16/103,721, filed Aug. 14, 2018, now U.S. Pat. No.10,763,255, issued Sep. 1, 2020 which is herein incorporated byreference in its entirety.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experienced rapidgrowth. In the course of IC evolution, functional density (i.e., thenumber of interconnected devices per chip area) has increased whilegeometry size (i.e., the smallest component (or line) that can becreated using a fabrication process) has decreased. This scaling downprocess increases production efficiency and lowers associated costs.

Such scaling down has also increased the complexity of processing andmanufacturing ICs and, for these advances to be realized, similardevelopments in IC processing and manufacturing are desired. Forexample, a three dimensional transistor, such as a fin-like field-effecttransistor (FinFET), has been introduced to replace a planar transistor.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A to 15A are perspective views of a method for manufacturing asemiconductor device at various stages in accordance with someembodiments of the present disclosure.

FIGS. 1B to 15B are side views of FIGS. 1A to 15A, respectively.

FIG. 15C is a cross-sectional view taken along the metal gate directionMG of FIG. 15A.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

The fins may be patterned by any suitable method. For example, the finsmay be patterned using one or more photolithography processes, includingdouble-patterning or multi-patterning processes. Generally,double-patterning or multi-patterning processes combine photolithographyand self-aligned processes, allowing patterns to be created that have,for example, pitches smaller than what is otherwise obtainable using asingle, direct photolithography process. For example, in one embodiment,a sacrificial layer is formed over a substrate and patterned using aphotolithography process. Spacers are formed alongside the patternedsacrificial layer using a self-aligned process. The sacrificial layer isthen removed, and the remaining spacers may then be used to pattern thefins.

The present disclosure will be described with respect to embodiments forsemiconductors formed of fin field effect transistors (FinFETs). Theembodiments of the disclosure may also be applied, however, to a varietyof integrated circuits. Various embodiments will be explained in detailwith reference to the accompanying drawings.

FIGS. 1A to 15A are perspective views of a method for manufacturing asemiconductor device at various stages in accordance with someembodiments of the present disclosure. FIGS. 1B to 15B are side views ofFIGS. 1A to 15A, respectively. FIG. 15C is a cross-sectional view takenalong the metal gate direction MG of FIG. 15A.

Reference is made to FIGS. 1A and 1B. The semiconductor device 10includes a substrate with plural patterned fins stood upright and devicefeatures can be formed on, above or over the plural patterned fins.

The substrate 100 may be a bulk silicon substrate. Alternatively, thesubstrate 100 may include an elementary semiconductor, such as silicon(Si) or germanium (Ge) in a crystalline structure; a compoundsemiconductor, such as silicon germanium (SiGe), silicon carbide (SiC),gallium arsenic (GaAs), gallium phosphide (GaP), indium phosphide (InP),indium arsenide (InAs), and/or indium antimonide (InSb); or combinationsthereof. Possible substrates 100 also include a silicon-on-insulator(SOI) substrate. SOI substrates are fabricated using separation byimplantation of oxygen (SIMOX), wafer bonding, and/or other suitablemethods.

The doped regions may be doped with p-type dopants, such as boron orBF₂; n-type dopants, such as phosphorus or arsenic; or combinationsthereof. The doped regions may be formed directly on the substrate 100,in a P-well structure, in an N-well structure, in a dual-well structure,and/or using a raised structure. The substrate 100 may further includevarious active regions, such as regions configured for an N-typemetal-oxide-semiconductor transistor device and regions configured for aP-type metal-oxide-semiconductor transistor device.

Semiconductor fins 110 are formed over the substrate 100 withindifferent functional regions, e.g., a LOGIC region and/or a memoryregion. In some embodiments, the semiconductor fins 110 may be of thesame type or of different types. For example, some of the fins 110 aren-type semiconductor fins, and the others of the fins 110 are p-typesemiconductor fins, and the present disclosure is not limited in thisrespect.

In some embodiments, a pad layer 122 and a mask layer 123 are disposedon the semiconductor fins 110. In some embodiments, the pad layer 122may be a thin film comprising silicon oxide formed, for example, using athermal oxidation process. The pad layer 122 may act as an adhesionlayer between the semiconductor fins 110 and the mask layer 123. In someembodiments, the mask layer 123 is formed of silicon nitride, forexample, using low-pressure chemical vapor deposition (LPCVD) or plasmaenhanced chemical vapor deposition (PECVD). The mask layer 123 is usedas a hard mask during following processes, such as photolithography.

The semiconductor fins 110 may be formed by suitable method. Forexample, a pad layer and a mask layer may be blanketed over thesubstrate 100. A patterned photo-sensitive layer is formed over thesubstrate 100. Then, the pad layer, the mask layer, and the substrate100 may be patterned using one or more photolithography processes withthe patterned photo-sensitive layer, including double-patterning ormulti-patterning processes, to form the pad layer 122, the mask layer123, and the semiconductor fins 110.

Reference is made to FIGS. 2A and 2B. A liner or spacer layer 120 isformed over the substrate 100. In some embodiments, the liner or spacerlayer 120 is formed to conformally cover the semiconductor fins 110 bysuitable deposition process, such as atomic layer deposition (ALD).Thus, plural trenches 125 are formed in the liner or spacer layer 120and between the semiconductor fins 110 and 210. For example, sometrenches 125 are formed between relatively close fins 110, and someother trenches 125 are formed between relatively distant fins 110. Insome embodiments, a thickness of the liner or spacer layer 120 is about12 nm to about 19 nm, and the present disclosure is not limited in thisrespect. In certain embodiments, the term “about” used in this contextmeans greater or less than the stated value or the stated range ofvalues by a percentage such as 5%, 10%, 15%, etc. of the stated values.

However, in some embodiments, if two adjacent fins are too close, theliner or spacer layer 120 may be filled in the space between the fins.For example, since the semiconductor fins 110 at the left side in FIG.3B are close enough, the liner or spacer layer 120 is filled in thespace between the semiconductor fins 110, and no trench is formedtherebetween.

Reference is made to FIGS. 3A and 3B. One or more etching process(es)are performed to remove parts of the semiconductor fins 110 and theliner or spacer layer 120 to form a recess 135 and cut each of the fins110 into two portions such that end surfaces of two separate portions ofeach fin 110 are exposed from the recess 135. As a result, the recess135 and the larger trench 125 between the patterned fins 110collectively form a cross-shaped concave area (i.e., from a top view)exposing parts of the substrate 100. Some mask layer may be used andpatterned to define the cross-shaped area before the etchingprocess(es).

In some embodiments, the etching process may include dry etchingprocess, wet etching process, and/or combination thereof. The recessingprocess may also include a selective wet etch or a selective dry etch. Awet etching solution includes a tetramethylammonium hydroxide (TMAH), aHF/HNO₃/CH₃COOH solution, or other suitable solution. The dry and wetetching processes have etching parameters that can be tuned, such asetchants used, etching temperature, etching solution concentration,etching pressure, source power, RF bias voltage, RF bias power, etchantflow rate, and other suitable parameters. For example, a wet etchingsolution may include NH₄OH, KOH (potassium hydroxide), HF (hydrofluoricacid), TMAH (tetramethylammonium hydroxide), other suitable wet etchingsolutions, or combinations thereof. Dry etching processes include abiased plasma etching process that uses a chlorine-based chemistry.Other dry etchant gasses include CF₄, NF₃, SF₆, and He. Dry etching mayalso be performed anisotropically using such mechanisms as DRIE (deepreactive-ion etching).

Reference is made to FIGS. 4A and 4B. A dielectric layer 140 is formedover the substrate 100 and filling the trenches 125 and the recess 135.In some embodiments, the portions of the dielectric layer 140 filled inthe trenches 125 may be referred to as dielectric fin or dummy fins 145.The dummy fins 145 are formed between some of the semiconductor fins110. For example, a dummy fin 145 is formed between immediate-adjacenttwo of the semiconductor fins 110. The dummy fin 145 may be spaced fromthe adjacent semiconductor fins 110 by the liner or spacer layer 120,and a bottom of the dummy fin 145 may also be spaced from the substrate100 by the liner or spacer layer 120. The dielectric layers 140 and thedummy fin 145 may also be collectively referred as a dielectric dummyfin layer. In some embodiments, the dielectric layer 140 is in contactwith end surfaces of the semiconductor fins 110.

In some embodiments, the relative large trench 125 and the recess 135covered by the dielectric layer 140 collectively form a cross-shapedconcave recess 135 a. The dielectric layer 140 surrounding the recess135 a may be spaced from the adjacent semiconductor fins 110 by theliner or spacer layer 120, and a bottom of the dielectric layer 140 mayalso be spaced from the substrate 100 by the liner or spacer layer 120.

In some embodiments, the dielectric layer 140 may include siliconnitride (SiN), oxynitride, silicon carbon (SiC), silicon oxynitride(SiON), oxide, SiO₂, Si₃N₄, SiOCN, or metal oxides, such as HfO₂, ZrO₂,HfAlO_(x), HfSiO_(x) and the like and may be formed by methods utilizedto form such a layer, such as CVD, plasma enhanced CVD, sputter, andother methods known in the art.

Reference is made to FIGS. 5A and 5B. A silicon oxide 148 is depositedin the cross-shaped concave recess 135 a. In some embodiments, thesilicon oxide 148 may be deposited by first depositing a flowable oxideand converting the flowable oxide to silicon oxide. The flowable oxidemay be deposited using a spin on glass (SOG) or flowable chemical vapordeposition (FCVD) process. Unlike the HDPCVD process, the SOG processand the FCVD process do not damage the semiconductor substrate 100 (thesidewall and bottom of the trench). Thus, the current leakage caused bythe HDPCVD process can be avoided. After being deposited in the recess135 a, the flowable oxide may be cured at a temperature ranging fromabout 600 degrees C. to about 1000 degrees C., to convert the flowableoxide to silicon oxide. From a top view, a cross-shaped area, i.e., thesilicon oxide 148, is formed between separate and adjacent dielectriclayers 140.

Reference is made to FIGS. 6A and 6B. One or more etching process(es)are performed to remove at least part of the dielectric layer 140 andtop portions of the silicon oxide 148 until a top surface of theremaining silicon oxide 148 a is below a top portion 110 a of thesemiconductor fin 110. In some embodiments, the top surface of theremaining silicon oxide 148 a may be at least below an interface betweenthe pad layer 122 and the semiconductor fin 110. After etching thesilicon oxide 148, the oxide-filled recess 135 a is a concave recesswith the dielectric layer 140 as surrounding sidewalls and the remainingsilicon oxide 148 a as a bottom.

In some embodiments, the etching process may include dry etchingprocess, wet etching process, and/or combination thereof. The recessingprocess may also include a selective wet etch or a selective dry etch. Awet etching solution includes a tetramethylammonium hydroxide (TMAH), aHF/HNO₃/CH₃COOH solution, or other suitable solution. The dry and wetetching processes have etching parameters that can be tuned, such asetchants used, etching temperature, etching solution concentration,etching pressure, source power, RF bias voltage, RF bias power, etchantflow rate, and other suitable parameters. For example, a wet etchingsolution may include NH₄OH, KOH (potassium hydroxide), HF (hydrofluoricacid), TMAH (tetramethylammonium hydroxide), other suitable wet etchingsolutions, or combinations thereof. Dry etching processes include abiased plasma etching process that uses a chlorine-based chemistry.Other dry etchant gasses include CF₄, NF₃, SF₆, and He. Dry etching mayalso be performed anisotropically using such mechanisms as DRIE (deepreactive-ion etching).

Reference is made to FIGS. 7A and 7B. A dielectric layer 144 is formedconformally over the dielectric layer 140 and the recesses 135 a. Therecess 135 a after being covered by the dielectric layer 144 still formsa concave top surface. Another oxide layer 150 is formed over thedielectric layer 144 and filled into the concave top surface of thedielectric layer 144 such that a substantially flat top surface may beformed. The oxide layer 150 may be formed by the same process as theoxide layer 148, e.g., flowable chemical vapor deposition (FCVD) processor different process.

Reference is made to FIGS. 8A and 8B. Then, a chemical-mechanicalplanarization (CMP) process is performed to remove the excessive oxidelayer 150 and dielectric layers 140, 144 until the semiconductor fins110 are exposed. After the CMP process, a substantially flat top surfaceis formed over the semiconductor fins 110, the dummy fins 145, thedielectric layers 140 and 144 a, and the remained oxide layer 150 a.That is, top surfaces of the semiconductor fins 110 and top surfaces ofthe dielectric layers 140 and 144 a are substantially coplanar, and topsurfaces of the semiconductor fins 110 and a top surface of the dummyfin 145 are substantially coplanar.

In some embodiments, a dual helmet structure 152 including the remainedoxide layer 150 a, the remained dielectric layer 144 a and a top portionof the dielectric layer 140 may be used as a CMP stop feature. Comparedwith using merely the dielectric layers 144 a and 140 as the CMP stopfeature, the dual helmet structure 152 with an oxide scheme, i.e., theremained oxide layer 150 a, is a CMP favored feature due to less CMPprocess end point curve noise (e.g., CMP end point signal noise). Thatis, a clear CMP end point signal is obtained due to the dual helmetstructure 152 with a large oxide surface, e.g., a by-product generatedby the fin 110 top materials, low k dielectric materials (e.g. 140 and144), the remained oxide layer 150 a and a CMP slurry may serve as theCMP stop favored feature.

After the CMP process, the semiconductor fins 110 are exposed with thepad layers 122 and the mask layers 123 removed, and all top surfaces ofthe semiconductor fins 110 may be substantially coplanar.

Reference is made to FIGS. 9A and 9B. One or more etching process(es)are performed to remove the remained oxide layer 150 a and at least partof the liner or spacer layers 120 between adjacent semiconductor fins110 and/or between the semiconductor fin 110 and the dummy fin 145. Anenough height of each semiconductor fin 110 is exposed after performingthe etching process(es). In some embodiments, the etching process(es)may be performed until top surfaces of the remained liner or spacerlayers 120 may be below a top surface of the remaining silicon oxide 148a. In some embodiments, the liner or spacer layers 120 may be referredas a isolation structure.

After performing the etching process(es), a second dielectric stage 160with a dielectric concave top portion is formed within an isolation areaand between the semiconductor fins 110. In some embodiments, thedielectric stage 160 may have a cross-shaped concave top portion. Inother embodiments, the dielectric stage 160 may include an oxidedielectric core (e.g., the silicon oxide 148 a) and a non-oxidedielectric layer (e.g., 140 and 144 a) entirely wrapping the oxidedielectric core. In other embodiments, the oxide dielectric core may bemade from a flowable oxide. In other embodiments, the dielectric layer140 surrounding the dielectric stage 160 and the dummy fin 145 may bemade from the same materials by the same deposition process. In otherembodiments, the dielectric layer 144 a on top of the silicon oxide 148a may be made from materials different from the dielectric layer 140.The dielectric layer 144 a may be referred as a helmet layer for thedielectric stage 160. In other embodiments, the dielectric layer 144 aon top of the silicon oxide 148 a may include, for example, a high-kdielectric material such as metal oxides, metal nitrides, metalsilicates, transition metal-oxides, transition metal-nitrides,transition metal-silicates, oxynitrides of metals, metal aluminates,zirconium silicate, zirconium aluminate, or combinations thereof.

In some embodiments, the etching process may include dry etchingprocess, wet etching process, and/or combination thereof. The recessingprocess may also include a selective wet etch or a selective dry etch. Awet etching solution includes a tetramethylammonium hydroxide (TMAH), aHF/HNO₃/CH₃COOH solution, or other suitable solution. The dry and wetetching processes have etching parameters that can be tuned, such asetchants used, etching temperature, etching solution concentration,etching pressure, source power, RF bias voltage, RF bias power, etchantflow rate, and other suitable parameters. For example, a wet etchingsolution may include NH₄OH, KOH (potassium hydroxide), HF (hydrofluoricacid), TMAH (tetramethylammonium hydroxide), other suitable wet etchingsolutions, or combinations thereof. Dry etching processes include abiased plasma etching process that uses a chlorine-based chemistry.Other dry etchant gasses include CF₄, NF₃, SF₆, and He. Dry etching mayalso be performed anisotropically using such mechanisms as DRIE (deepreactive-ion etching).

Reference is made to FIGS. 10A and 10B. A thin oxide layer 155 is formedover a top surface of the dielectric stage 160, outer surfaces of thesemiconductor fins 110 and an outer surface of the dummy fin 145. Theoxide layer 155 may act as gate dielectric in later process.

Reference is made to FIGS. 11A and 11B. Plural dummy gates 180 areformed over the oxide layer 155, in which the dummy gates 180 a crossthe semiconductor fins 110, the dummy fin 145 and the dielectric stage160, and the dummy gates 180 b cross the dielectric stage 160. Thedielectric stage 160 anchors the dummy gates 180 on the isolation areato avoid the risk of dummy gate collapse due to a high aspect ratio.Without the dielectric stage 160, the dummy gates 180 b may be patternedwith a high aspect ratio and have a relatively high risk of collapse.

In some embodiments, the dummy gates 180 b may stand within a concavearea of the dielectric layer 144 a (part of the dielectric stage 160).In some embodiments, the dummy gates 180 b may have its bottom at leastpartially in contact with the concave area of the dielectric layer 144 a(part of the dielectric stage 160).

Since the dielectric stage 160 has its top portion that is substantiallylevel with top portions of the semiconductor fins 110 and the dummy fins145 around, at least the dummy gates 180 b are formed with a relativelysmall aspect ratio compared with that of the dummy gates formed on thesubstrate without the isolation structure (not shown in the drawings).

In some embodiments, mask layers 182 and 184 are formed over the dummygates 180. The mask layers 182 and 184 acts as a hard mask during thepatterning process of the dummy gates 180 and may act as a hard maskduring the following processes, such as etching. In some embodiments,the mask layers 182 and 184 may include silicon oxide, silicon nitrideand/or silicon oxynitride.

In some embodiments, the dummy gates 180 may includepolycrystalline-silicon (poly-Si) or poly-crystalline silicon-germanium(poly-SiGe). Further, the dummy gates may be doped poly-silicon withuniform or non-uniform doping. In some embodiments, the dummy gates 180may be formed by, for example, forming a dummy gate material layer overthe oxide layer 155. Patterned masks, such as mask layers 182 and 184,are formed over the dummy gate material layer. Then, the dummy gatematerial layer may be patterned using one or more etching processes,such as one or more dry plasma etching processes or one or more wetetching processes. During the etching process, the patterned mask mayact as an etching mask. At least one parameter, such as etchant, etchingtemperature, etching solution concentration, etching pressure, sourcepower, radio frequency (RF) bias voltage, etchant flow rate, of thepatterning (or etching) recipe can be tuned. For example, dry etchingprocess, such as plasma etching, may be used to etch the dummy gatematerial layer and the oxide layer 155 until the semiconductor fins 110and the dummy fin 145 are exposed.

Reference is made to FIGS. 12A and 12B. Gate spacer structures includingplural gate spacers 190 on opposite sidewalls of the dummy gates 180 areformed. In some embodiments, at least one of the gate spacers 190includes single or multiple layers. The gate spacers 190 can be formedby blanket depositing one or more dielectric layer(s) on the previouslyformed structure. The dielectric layer(s) may include silicon nitride(SiN), oxynitride, silicon carbon (SiC), silicon oxynitride (SiON),oxide, and the like. The gate spacers 190 may be formed by methods suchas CVD, plasma enhanced CVD, sputter, or the like. The gate spacers 190may then be patterned, such as by one or more etch processes to removehorizontal portions of the gate spacers 190 from the horizontal surfacesof the structure.

The oxide layer 155 exposed from the dummy gates 180 and the gatespacers 190 are removed by suitable process, such as etching. Theremained portions of the oxide layer 155 are disposed under the dummygates 180 and the gate spacers 190. Thus, the remained portions of theoxide layer 155 may be referred to as gate dielectric. Also, the dummygate 180 and the remained oxide layer 155 may collectively be referredto as a dummy gate stack.

Portions of the semiconductor fins 110 and the dummy fins 145 areexposed after the oxide layer 155 are partially removed. Then, pluralsource/drain features 200 are respectively formed over the exposedsemiconductor fins 110 of the substrate 100. In some embodiments, theadjacent source/drain features 200 are spaced by and in contact with thedummy fin 145 such that the formation of the source/drain features 200are easily to be controlled.

In some embodiments, the source/drain features 200 may be epitaxystructures, and may also be referred to as epitaxy features 200. Thesource/drain features 200 may be formed using one or more epitaxy orepitaxial (epi) processes, such that Si features, SiGe features, and/orother suitable features can be formed in a crystalline state on thesemiconductor fins 110. In some embodiments, the source/drain features200 may be cladding over the semiconductor fins 110.

In some embodiments, lattice constants of the source/drain features 200are different from lattice constants of the semiconductor fins 110, suchthat channels in the semiconductor fins 110 are strained or stressed toenable carrier mobility of the semiconductor device and enhance thedevice performance. In some embodiments, the source/drain features 200may include semiconductor material such as germanium (Ge) or silicon(Si); or compound semiconductor materials, such as gallium arsenide(GaAs), aluminum gallium arsenide (AlGaAs), silicon germanium (SiGe),silicon carbide (SiC), or gallium arsenide phosphide (GaAsP).

The epitaxy processes include CVD deposition techniques (e.g.,vapor-phase epitaxy (VPE) and/or ultra-high vacuum CVD (UHV-CVD)),molecular beam epitaxy, and/or other suitable processes. The epitaxyprocess may use gaseous and/or liquid precursors, which interact withthe composition of the semiconductor fins 110 (e.g., silicon). Thesource/drain features 200 may be in-situ doped. The doping speciesinclude P-type dopants, such as boron or BF₂; N-type dopants, such asphosphorus or arsenic; and/or other suitable dopants includingcombinations thereof. If the source/drain features 200 are not in-situdoped, a second implantation process (i.e., a junction implant process)is performed to dope the source/drain features 200. One or moreannealing processes may be performed to activate the source/drainfeatures 200. The annealing processes include rapid thermal annealing(RTA) and/or laser annealing processes.

In some embodiments, the source/drain features 200 over thesemiconductor fins 100 may include the same doping-type, and thesource/drain feature 200 over one of the semiconductor fins 100 mayinclude doping-type different from that of the source/drain features 200over the other of the semiconductor fins 100. For example, somesource/drain features 200 may be n-type, and the other source/drainfeatures 200 may be p-type, and vise versa.

Reference is made to FIGS. 13A and 13B. An etching stop layer 215 andinterlayer dielectric 220 is formed over the dielectric stage 160, thesubstrate 100 and covers the source/drain features 200. Then, a CMPprocess is performed to remove the excessive interlayer dielectric 220,and the mask layers 182 and 184 (referring to FIGS. 11A and 11B) untilthe dummy gates 180 are exposed.

In some embodiments, the interlayer dielectric 220 may include siliconnitride, silicon oxynitride, silicon oxycarbonitride, silicon carbide,silicon germanium, or combinations thereof. The interlayer dielectric220 may be formed by a suitable technique, such as CVD, ALD and spin-oncoating. In some embodiments, air gaps may be created in the interlayerdielectric 220.

Then, a replacement gate (RPG) process scheme is employed. The dummygate stacks 185 are replaced with gate stacks 230. For example, thedummy gate stacks 185 are removed to from a plurality of gate trenches.The dummy gate stacks 185 are removed by a selective etch process,including a selective wet etch or a selective dry etch, and carries asubstantially vertical profile of the gate spacers 190. The gatetrenches expose portions of the semiconductor fins 110 and 210 of thesubstrate 100. Then, the gate stacks 230 are formed respectively in thegate trenches and cover the semiconductor fins 110 and 210 of thesubstrate 100. The gate stacks 230 may be also referred as the gatestructures.

The gate stacks 230 include an interfacial layer (not shown), gatedielectrics 232 formed over the interfacial layer, and gate metals 234formed over the gate dielectrics 232. The gate dielectrics 232, as usedand described herein, include dielectric materials having a highdielectric constant, for example, greater than that of thermal siliconoxide (˜3.9). The gate metals 234 may include a metal, metal alloy,and/or metal silicide.

In some embodiments, the gate metals 234 included in the gate stacks 230may include a single layer or alternatively a multi-layer structure,such as various combinations of a metal layer with a work function toenhance the device performance (work function metal layer), liner layer,wetting layer, adhesion layer and a conductive layer of metal, metalalloy or metal silicide. For example, the gate metals 234 may be ann-type or p-type work function layer. Exemplary p-type work functionmetals include TiN, TaN, Ru, Mo, Al, WN, ZrSi₂, MoSi₂, TaSi₂, NiSi₂, WN,other suitable p-type work function materials, or combinations thereof.Exemplary n-type work function metals include Ti, Ag, TaAl, TaAlC,TiAlN, TaC, TaCN, TaSiN, Mn, Zr, other suitable n-type work functionmaterials, or combinations thereof. The work function layer may includea plurality of layers. The work function layer(s) may be deposited byCVD, PVD, electro-plating and/or other suitable process.

In some embodiments, the interfacial layer may include a dielectricmaterial such as silicon oxide (SiO₂), HfSiO, and/or silicon oxynitride(SiON). The interfacial layer may be formed by chemical oxidation,thermal oxidation, ALD, CVD, and/or other suitable method. The gatedielectrics 232 may include a high-K dielectric layer such as hafniumoxide (HfO₂). Alternatively, the gate dielectric 212 may include otherhigh-K dielectrics, such as TiO₂, HfZrO, Ta₂O₃, HfSiO₄, ZrO₂, ZrSiO₂,LaO, A₁₀, ZrO, TiO, Ta₂O₅, Y₂O₃, SrTiO₃ (STO), BaTiO₃ (BTO), BaZrO,HfZrO, HfLaO, HfSiO, LaSiO, AlSiO, HfTaO, HfTiO, (Ba,Sr)TiO₃ (BST),Al₂O₃, Si₃N₄, oxynitrides (SiON), combinations thereof, or othersuitable material. The gate dielectrics 232 may be formed by ALD, PVD,CVD, oxidation, and/or other suitable methods.

Reference is made to FIGS. 14A and 14B. An etching process is performedto remove portions of the gate stacks 230. During the etching process,plural openings 235 are formed in the gate stacks 230. In someembodiments, the openings 235 may expose at least portions of the dummyfin 145 and the dielectric layer 144 a (part of the dielectric stage160), as shown in FIG. 15C. Then, plural isolation features 240 areformed in the openings 235. In some embodiments, the isolation features240 may be formed by depositing a dielectric layer blanketing thesubstrate 100. Then, a CMP process is performed to remove the excessivedielectric layer until the gate stacks 230 are exposed. Some of theisolation features 240 are in contact with the dielectric layer 144 aand the dummy fin 145. The gate stack 230 with the isolation features240 may be divided into separate parts, as shown in FIG. 15C. Theisolation features may also be referred as gate isolation structures.

Reference is made to FIGS. 15A and 15B. An etching process is performedto remove portions of the interlayer dielectric 220. Thus, pluralopenings 245 are formed in the interlayer dielectric 220 and the etchingstop layer 215 to expose the source/drain features 200 and the dummyfins 145.

Then, plural contacts 250 are formed in the openings 245. The contacts250 may be formed by depositing a conductive material layer over thesubstrate 100 and following with a CMP process until the gate stacks 230are exposed. In some embodiments, the contacts 250 are in contact withthe source/drain features 200 and the dummy fins 145. For example, inFIG. 15B, the contact 250 is in contact with the source/drain features200 over the semiconductor fins 110, and is in contact with the dummyfins 145 between the semiconductor fins 110. The dummy fin 145 cansupport the contact 250, such that the contact 250 does not extendfurther into a space between the source/drain features 200. In someembodiments, at least one of the contacts 250 includes a barrier layer251 and conductive layer 252. In some embodiments, the source/drainfeatures 200 have their sidewalls in contact with the dielectric layer40 and the dummy fin 145. In some embodiments, the conductive layer 252may include suitable metal, such as TiN, WN, TaN, or Ru, which performsin a p-type FinFET. In some alternative embodiments, the metal layer mayinclude suitable metal, such as Ti, Ag, Al, TiAl, TiAlN, TiAlC, TiAlCN,TaC, TaCN, TaSiN, Mn, or Zr, which performs in an n-type FinFET. In someother embodiments, the contacts 250 may be multi-layer including, workfunction layers, liner layers, interface layers, seed layers, adhesionlayers, barrier layers and so on.

Reference is made to FIG. 15C, which is a cross-sectional view takenalong the metal gate direction MG of FIG. 15A. In some embodiments, oneisolation feature 240 is in contact with the dummy fin 145 while anotherisolation feature 240 is in contact with a top surface of the dielectricstage 160, e.g., a top surface of the dielectric layer 144 a such thatthe gate stack 230 may be divided into separate parts. In someembodiments, the dielectric stage 160 has a helmet layer (i.e., 144 a)with a thinner portion and two thicker portions with the helmet depth(D), and the thinner portion is coupled between the two thicker portionswith the helmet depth (D). A thickness difference between the thinnerportion and the thicker portion is referred as the concave depth (d). Insome embodiments, a top surface of the helmet layer (i.e., 144 a) ishigher than a top surface of the liner or spacer layer 120 (i.e., anisolation structure). In some embodiments, the dielectric concave topportion of the dielectric stage 160 may be equipped with a total helmetdepth (D) ranging from about 15 nm to about 80 nm in order to cover theoxide 148 a underneath and anchor the dummy gates on its top surface.When the total helmet depth (D) is smaller than 15 nm, it may be easilyetched and the oxide 148 a underneath is thus exposed. In someembodiments, the dielectric concave top portion of the dielectric stage160 may be equipped with a concave depth (d) ranging from about 3 nm toabout 40 nm, and this depth (d) range may be easily formed on the helmetlayer (i.e., 144 a) along with the total helmet depth (D) ranging fromabout 15 nm to about 80 nm. In some embodiments, the dielectric layer140 wrapping around the dielectric stage 160 may be equipped with ahelmet width (W) greater than about 60 nm along the metal gate directionMG, i.e., a longitudinal direction of the gate stack. The helmet width(W) greater than about 60 nm is enough to allow a concave helmet layer(i.e., 144 a) formed thereon with an oxide-filled that is favored forCMP semiconductor fins stop feature due.

In some embodiments, a top surface of the dielectric layer 140 issubstantially coplanar with a top surface of the helmet layer (i.e., 144a). In some embodiments, a top surface of the dielectric layer 140 issubstantially coplanar with top surfaces of the fins 110.

According to aforementioned embodiments, a semiconductor device includesa dielectric stage located over a substrate and between thesemiconductor fins of the substrate. The dielectric stage has a concaveshape helmet that is substantially coplanar with top surfaces of thesemiconductor fins and allows dummy gates to be formed thereon. Thedielectric stage may include an oxide dielectric core and a non-oxidedielectric layer wrapping the oxide dielectric core, and the oxidedielectric core may be a flowable oxide. With such configurations, thedielectric stage anchors the dummy gates on its top surface to avoid therisk of dummy gate collapse due to a high aspect ratio. Also, theconcave helmet with an oxide-filled within the concave part is CMPfavored due to less CMP end point curve noise, and the oxide surface isfavored for CMP semiconductor fins stop feature.

An embodiment of the present disclosure is a semiconductor device havinga substrate and first, second fins, an isolation structure between thefirst and second fins, a dielectric stage in the isolation structure,and a helmet layer over the dielectric stage. A top surface of thehelmet layer is higher than a top surface of the isolation structure.

An embodiment of the present disclosure is that the helmet layer has afirst portion, a second portion, and a third portion, the first portionconnects the second portion and the third portion, and each of thesecond portion and the third portion is thicker than the first portion.

An embodiment of the present disclosure is that a thickness of thesecond portion of the helmet layer is in a range from about 15 nm toabout 80 nm.

An embodiment of the present disclosure is that a thickness differencebetween the first portion and the second portion of the helmet layer isin a range from about 3 nm to about 40 nm.

An embodiment of the present disclosure is the semiconductor devicefurther including a dielectric dummy fin layer wrapping around thedielectric stage.

An embodiment of the present disclosure is that a top surface of thedielectric dummy fin layer is substantially coplanar with the topsurface of the helmet layer.

An embodiment of the present disclosure is that a top surface of thedielectric dummy fin layer is substantially coplanar with a top surfaceof the first fin.

An embodiment of the present disclosure is the semiconductor devicefurther including a gate structure over the first fin, the helmet layer,and the dielectric dummy fin layer.

An embodiment of the present disclosure is that a width of thedielectric dummy fin layer along a longitudinal direction of the gatestructure is greater than about 60 nm.

An embodiment of the present disclosure is the semiconductor devicefurther including a first epitaxy structure adjoining the first fin andin contact with the dielectric dummy fin layer.

An embodiment of the present disclosure is the semiconductor devicefurther including a second epitaxy structure adjoining the second finand in contact with the dielectric dummy fin layer.

An embodiment of the present disclosure is the semiconductor devicefurther including a gate structure over the first fin and the helmetlayer, and a gate isolation structure in the gate structure and landingon the helmet layer.

An embodiment of the present disclosure is a semiconductor device havingfirst fin and second fins, a dielectric stage between an end surface ofthe first fin and an end surface of the second fin, a dielectric dummyfin layer wrapping around the dielectric stage, and a helmet layer overthe dielectric stage.

An embodiment of the present disclosure is that a top surface of thedielectric dummy fin layer is substantially coplanar with a top surfaceof the first fin.

An embodiment of the present disclosure is that the dielectric dummy finlayer is in contact with the end surface of the first fin.

An embodiment of the present disclosure is that the dielectric dummy finlayer is in contact with the end surface of the second fin.

An embodiment of the present disclosure is a method for depositing afirst dielectric layer over a first fin and a second fin; depositing adielectric dummy fin layer over the first dielectric layer, wherein thedielectric dummy fin layer has a first portion over top surfaces of thefirst fin and the second fin; depositing a second dielectric layer overthe dielectric dummy fin layer; removing a first portion of the seconddielectric layer over a top surface of the first portion of thedielectric dummy fin layer, wherein a second portion of the seconddielectric layer remains between the first fin and the second fin;recessing the second portion of the second dielectric layer; removingthe first portion of the dielectric dummy fin layer, wherein a secondportion of the dielectric dummy fin layer remains between the first finand the second fin; depositing a helmet layer over the recessed secondportion of the second dielectric layer and the second portion of thedielectric dummy fin layer; depositing a third dielectric layer over thehelmet layer; and removing the third dielectric layer, the helmet layer,the dielectric dummy fin layer, and the first dielectric layer over thetop surfaces of the first fin and the second fin.

An embodiment of the present disclosure is the method further includingdepositing the helmet layer over the recessed second portion of thesecond dielectric layer and the second portion of the dielectric dummyfin layer is performed such that the helmet layer defines a recess overthe recessed second portion of the second dielectric layer, and a bottomof the recess is lower than the top surfaces of the first fin and thesecond fin.

An embodiment of the present disclosure is the method further includingetching the first dielectric layer, the first fin and the second fin toexpose end surfaces of the first fin and the second fin prior todepositing the dielectric dummy fin layer.

An embodiment of the present disclosure is the method further includingdepositing the dielectric dummy fin layer is performed such that thedielectric dummy fin layer is in contact with the end surfaces of thefirst fin and the second fin.

In some embodiments, a method for forming a semiconductor deviceincludes: forming a semiconductor fin extending upwardly from asubstrate; breaking the semiconductor fin into two separate finstructures; conformally forming a first dielectric layer over the finstructures; after conformally forming the first dielectric layer,filling a recess between the fin structures with a flowable oxide;etching back the flowable oxide to lower a top surface of the flowableoxide to a level below top surfaces of the fin structures; conformallyforming a second dielectric layer over the first dielectric layer andthe etched back flowable oxide, such that a laterally portion of thesecond dielectric layer in the recess is lower than the top surfaces ofthe fin structures; and planarizing the first and second dielectriclayers to expose the fin structures, while leaving the laterally portionof the second dielectric layer covering the flowable oxide.

In some embodiments, further includes: curing the flowable oxide isperformed prior to etching back the flowable oxide.

In some embodiments, the flowable oxide is formed of a materialdifferent than the first and second dielectric layers.

In some embodiments, planarizing the first and second dielectric layersis performed such that top surface of first and second dielectric layersare coplanar with the top surfaces of the fin structures.

In some embodiments, the method further includes forming a secondflowable oxide layer over the second dielectric layer to fill into therecess, wherein planarizing the first and second dielectric layers isperformed on the second flowable oxide, such that top surfaces of thefirst and second dielectric layers in the recess are coplanar with a topsurface of the second flowable oxide in the recess.

In some embodiments, the planarized second flowable oxide layer in therecess has a thickness in a range from about 3 nm to about 40 nm afterplanarizing the first and second dielectric layers is complete.

In some embodiments, the method further includes removing the planarizedsecond flowable oxide layer after planarizing the first and seconddielectric layers.

In some embodiments, the second dielectric layer has a material the sameas the first dielectric layer.

In some embodiments, the second dielectric layer is formed of metaloxide.

In some embodiments, the second dielectric layer is formed of acarbon-containing material.

In some embodiments, a method for forming a semiconductor deviceincludes: forming first and second semiconductor fins extending upwardlyfrom a substrate; conformally forming a spacer layer over the first andsecond semiconductor fins; conformally forming a first dielectric layerover the spacer layer; after conformally forming the first dielectriclayer, forming a flowable oxide layer laterally between the first andsecond semiconductor fins; conformally forming a second dielectric layerover the first dielectric layer and the flowable oxide layer, whereinthe second dielectric layer has a portion laterally between the firstand second semiconductor fins; performing a chemical-mechanicalplanarization (CMP) process on the first and second dielectric layersand the spacer layer, such that the first and second semiconductor finsare exposed; after performing the CMP process, thinning down the spacerlayer; and after thinning down the spacer layer, forming a gatestructure extending across the first and second semiconductor fins.

In some embodiments, thinning down the spacer layer is performed suchthat a topmost surface of the spacer layer is lower than a top surfaceof the flowable oxide layer.

In some embodiments, thinning down the spacer layer is performed suchthat a topmost surface of the spacer layer is higher than a lateralportion of the first dielectric layer.

In some embodiments, thinning down the spacer layer is performed suchthat a vertical portion of the first dielectric layer above a topmostsurface of the spacer layer has a width narrower than below the topmostsurface of the spacer layer.

In some embodiments, the second dielectric layer has a material the sameas the first dielectric layer.

In some embodiments, the second dielectric layer is formed of asilicon-containing material.

In some embodiments, a method for forming a semiconductor deviceincludes: depositing a first dielectric layer over a first fin and asecond fin; depositing a dielectric dummy fin layer over the firstdielectric layer, wherein the dielectric dummy fin layer has a firstportion over top surfaces of the first fin and the second fin;depositing a second dielectric layer over the dielectric dummy finlayer; removing a first portion of the second dielectric layer over atop surface of the first portion of the dielectric dummy fin layer,wherein a second portion of the second dielectric layer remains betweenthe first fin and the second fin; recessing the second portion of thesecond dielectric layer; removing the first portion of the dielectricdummy fin layer, wherein a second portion of the dielectric dummy finlayer remains between the first fin and the second fin; depositing ahelmet layer over the recessed second portion of the second dielectriclayer and the second portion of the dielectric dummy fin layer;depositing a third dielectric layer over the helmet layer; and removingthe third dielectric layer, the helmet layer, the dielectric dummy finlayer, and the first dielectric layer over the top surfaces of the firstfin and the second fin.

In some embodiments, depositing the helmet layer over the recessedsecond portion of the second dielectric layer and the second portion ofthe dielectric dummy fin layer is performed such that the helmet layerdefines a recess over the recessed second portion of the seconddielectric layer, and a bottom of the recess is lower than the topsurfaces of the first fin and the second fin.

In some embodiments, further includes: etching the first dielectriclayer, the first fin and the second fin to expose end surfaces of thefirst fin and the second fin prior to depositing the dielectric dummyfin layer.

In some embodiments, depositing the dielectric dummy fin layer isperformed such that the dielectric dummy fin layer is in contact withthe end surfaces of the first fin and the second fin.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method for forming a semiconductor device,comprising: forming a semiconductor fin extending upwardly from asubstrate; breaking the semiconductor fin into two separate finstructures; conformally forming a first dielectric layer over the finstructures; after conformally forming the first dielectric layer,filling a recess between the fin structures with a first flowable oxide;etching back the first flowable oxide to lower a top surface of thefirst flowable oxide to a level below top surfaces of the finstructures; conformally forming a second dielectric layer over the firstdielectric layer and the etched back first flowable oxide, such that alateral portion of the second dielectric layer in the recess is lowerthan the top surfaces of the fin structures; planarizing the first andsecond dielectric layers to expose the fin structures, while leaving thelateral portion of the second dielectric layer covering the firstflowable oxide; and forming first and second gate structures extendingacross the fin structures, respectively.
 2. The method of claim 1,further comprising: curing the first flowable oxide prior to etchingback the first flowable oxide.
 3. The method of claim 1, wherein thefirst flowable oxide is formed of a material different than the firstand second dielectric layers.
 4. The method of claim 1, whereinplanarizing the first and second dielectric layers is performed suchthat top surface of the first and second dielectric layers are coplanarwith the top surfaces of the fin structures.
 5. The method of claim 1,further comprising: prior to planarizing the first and second dielectriclayers, forming a second flowable oxide layer over the second dielectriclayer to fill the recess, wherein planarizing the first and seconddielectric layers is performed using a chemical-mechanical planarization(CMP) process that also planarizes the second flowable oxide layer. 6.The method of claim 5, wherein the planarized second flowable oxidelayer has a thickness in a range from about 3 nm to about 40 nm.
 7. Themethod of claim 5, further comprising: removing the planarized secondflowable oxide layer.
 8. The method of claim 1, wherein the seconddielectric layer has a material the same as the first dielectric layer.9. The method of claim 1, wherein the second dielectric layer is formedof metal oxide.
 10. The method of claim 1, wherein the second dielectriclayer is formed of a carbon-containing material.
 11. A method forforming a semiconductor device, comprising: forming first and secondsemiconductor fins extending upwardly from a substrate; conformallyforming a spacer layer over the first and second semiconductor fins;conformally forming a first dielectric layer over the spacer layer;after conformally forming the first dielectric layer, forming a flowableoxide layer laterally between the first and second semiconductor fins;conformally forming a second dielectric layer over the first dielectriclayer and the flowable oxide layer, wherein the second dielectric layerhas a portion laterally between the first and second semiconductor fins;performing a chemical-mechanical planarization (CMP) process on thefirst and second dielectric layers and the spacer layer, such that thefirst and second semiconductor fins are exposed; after performing theCMP process, thinning down the spacer layer, such that a topmost surfaceof the spacer layer is lower than a top surface of the flowable oxidelayer; and after thinning down the spacer layer, forming a gatestructure extending across the first and second semiconductor fins. 12.The method of claim 11, wherein thinning down the spacer layer isperformed such that the topmost surface of the spacer layer is higherthan a lateral portion of the first dielectric layer.
 13. The method ofclaim 11, wherein a vertical portion of the first dielectric layer has anarrower width above the topmost surface of the spacer layer than belowthe topmost surface of the spacer layer after thinning down the spacerlayer is complete.
 14. The method of claim 11, wherein the seconddielectric layer has a material the same as the first dielectric layer.15. The method of claim 1, wherein the second dielectric layer is formedof a silicon-containing material.
 16. A method for forming asemiconductor device, comprising: depositing a first dielectric layerover a first fin and a second fin; depositing a dielectric dummy finlayer over the first dielectric layer, wherein the dielectric dummy finlayer has a first portion over top surfaces of the first fin and thesecond fin; depositing a second dielectric layer over the dielectricdummy fin layer; removing a first portion of the second dielectric layerover a top surface of the first portion of the dielectric dummy finlayer, wherein a second portion of the second dielectric layer remainsbetween the first fin and the second fin; recessing the second portionof the second dielectric layer; removing the first portion of thedielectric dummy fin layer, wherein a second portion of the dielectricdummy fin layer remains between the first fin and the second fin;depositing a helmet layer over the recessed second portion of the seconddielectric layer and the second portion of the dielectric dummy finlayer; depositing a third dielectric layer over the helmet layer; andremoving the third dielectric layer, the helmet layer, the dielectricdummy fin layer, and the first dielectric layer over the top surfaces ofthe first fin and the second fin.
 17. The method of claim 16, whereindepositing the helmet layer over the recessed second portion of thesecond dielectric layer and the second portion of the dielectric dummyfin layer is performed such that the helmet layer defines a recess overthe recessed second portion of the second dielectric layer, and a bottomof the recess is lower than the top surfaces of the first fin and thesecond fin.
 18. The method of claim 16, further comprising: etching thefirst dielectric layer, the first fin and the second fin to expose endsurfaces of the first fin and the second fin prior to depositing thedielectric dummy fin layer.
 19. The method of claim 16, whereindepositing the dielectric dummy fin layer is performed such that thedielectric dummy fin layer is in contact with end surfaces of the firstfin and the second fin.
 20. The method of claim 11, wherein the seconddielectric layer is formed of metal oxide.